| 摘要 |
PROBLEM TO BE SOLVED: To enable high-speed measurement having a wide wavelength range. SOLUTION: A reflector 30 for reflecting diffracted light G1 from a diffraction grating 25 is constituted of fixed substrates 31, 32, shaft parts 33, 34 torsionally deformable along the length direction, elongated with a prescribed width and a prescribed length from the edges thereof, a reflection plate 35 formed by being connected to the tips of the shaft parts 34, 34 at the edge parts thereof and having a reflecting surface formed on one face side. A force is applied to the reflection plate 35 by an electric signal having a frequency corresponding to the characteristic frequency of a part comprising the shaft parts 33, 34 and the reflection plate 35 of the reflector 30, and thereby the reflection plate 35 is reciprocatively rotated with the characteristic frequency or the frequency similar thereto. COPYRIGHT: (C)2004,JPO
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