| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact which has a relative density of ≥99%, a warpage of ≤0.5 μm/mm, a dimensional dispersion of ≤0.045%, and a bending strength of ≥500 MPa. <P>SOLUTION: The aluminum nitride sintered compact is obtained by mixing aluminum nitride granules (granule A) having a grain strength of ≥0.6 MPa and an average particle diameter of 20-30 μm and aluminum nitride granules (granule B) having a grain strength of ≤0.5 MPa and an average particle diameter of 70-90 μm, then press forming the resulting mixture so as to obtain an aluminum nitride compact having a relative density of ≥65%, and thereafter sintering the obtained compact. In this case, it is preferable that the average primary particle diameter of the aluminum nitride powder in the granule B is 1.5-10 times that of the aluminum nitride powder in the granule A, and the ratio of the granule B to 100 parts by mass of the granule A is 200-500 parts by mass. <P>COPYRIGHT: (C)2004,JPO |
