Method and apparatus for providing and integrating a general metal delivery source (gmds) with atomic layer deposition (ald),申请号AU20030290694-传众专利搜索

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发明名称	Method and apparatus for providing and integrating a general metal delivery source (gmds) with atomic layer deposition (ald)
摘要
申请公布号	AU2003290694(A8)	申请公布日期	2004.06.03
申请号	AU20030290694	申请日期	2003.11.10
申请人	GENUS, INC.	发明人	OFER SNEH
分类号	C23C16/40;C23C16/448;(IPC1-7):C23C16/00	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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