发明名称 IC handler
摘要 A disk (6) is horizontally rotated a half-turn by a motor (7) in a rotational direction and, then, is rotated a half-turn in an opposite rotational direction. Two servomotors (8, 9) are symmetrically disposed, on an upper surface of the disk (6), with respect to a rotating shaft of the disk (6). Driving shafts (22, 23), driven by the two servomotors (8, 9), downwardly extend through the disk (6), and move hanging members (K, M), respectively, in upward-and-downward directions. Two hanging members (K, M) are provided, at their lower ends, with clampers (32), respectively. The clampers (32) are each provided, at their bottom surfaces, with a suction pad (35), and are provided, at their upper surfaces, with pneumatic cylinders (28, 29). The pressure of the compressed air supplied to the pneumatic cylinder is adjusted by a pressure regulating device (38).
申请公布号 US6742981(B2) 申请公布日期 2004.06.01
申请号 US20020204256 申请日期 2002.08.19
申请人 TOHOKU SEIKI INDUSTRIES, LTD. 发明人 HARADA KEITARO;YOKOO MASAYOSHI;ONUMA SHIGEO;UENO SATOSHI
分类号 G01R31/26;G01R31/01;G01R31/28;H01L21/687;(IPC1-7):B65H1/00 主分类号 G01R31/26
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