| 摘要 |
<p>The tricomponent magnetometer is based on the integral silicon technology. It has simplified instrumentation structure and reduced overall dimensions. The most complex metrological problem in magnetism - simultaneous and independent detection of the three orthogonal components of the magnetic vector - is solved by means of five ohmic contacts. The tricomponent magnetometer comprises a square semiconductor wafer (1) of n-type mixed conductivity. On one of the sides of this wafer (1), along its ends and at equal distances from it peaks, are formed one each supply ohmic contact (2, 3, 4 and 5). In the middle part there is a central supply ohmic contact (6) of square shape. Along the length of one of the diagonals, not reaching the central supply contact (6), are formed, respectively, one each longitudinal deep pockets (7 and 8) by p-type conductivity. The opposite supply contacts (2, 4 and 3, 5), across equal-valued resistors (9, 10, 11 and 12) are connected to one of the outputs of the current source (13) the other output of which is connected to the central supply contact (6). The voltage outputs (14, 15 and 16) for the three components of the magnetic field (17) are, respectively, the pairs of opposite supply contacts (2 and 4, and 3 and 5), and to adjacent supply contacts (2 and 3), found in one of the halves of the region, formed by the two deep pockets (7 and 8). The external magnetic field (17) has a random direction towards the semiconductor wafer (1). 1 claim, 1 figure</p> |
