| 摘要 |
A method and device for marking an identification code on an article to be marked on a stage by means of a laser beam. The laser beam outputted from an exposure unit is so scanned as to deflect in time series in order in a direction perpendicular to the relative movement direction with respect to the stage. The irradiation is shifted synchronously in the relative movement direction. The irradiated points on the article are arranged like orthogonal coordinates. Another method and device is for making arrays of identification codes while one exposure unit is moving by one pitch in the relative movement direction.
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