| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection repair system and an inspection repair method wherein an organic light-emitting device can be inspected and repaired efficiently. SOLUTION: The inspection and repair system 1 comprises an optical microscope 11, an video image retrieval device 12, a photon detector 13, a data process controller 14, and a high energy beam generating device 15. When a defective position is detected by the inspection repair system 1, a negative bias is applied to the waiting zone of inspection of the organic light-emitting device 3 and the defective position where a glimmering light phenomenon occurs in the magnified video image is detected by the photon detector 13, and a high energy beam for isolating the defective position is generated by the high energy beam generating device 15. COPYRIGHT: (C)2004,JPO
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