METHOD OF MANUFACTURING OPTICAL SWITCH ELEMENT

摘要

PROBLEM TO BE SOLVED: To easily form a protective layer on control electrode part furnished in a complicated three-dimensional structure body so that a direct contact of such a movable part as a mirror with a control electrode part is prevented when driven and a smooth operation is continued. SOLUTION: A photosensitive resin pattern 301 covering the control electrode part 140 is formed by a stencil printing plate method such as a screen printing method, a desired region including the uppermost part of the control electrode part 140 of the of photosensitive resin pattern 301 is exposed, developed and the protective layer 302 covering a predetermined region including the uppermost part of the control electrode part 140 is formed. COPYRIGHT: (C)2004,JPO