| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a surface coated silicon nitride sintered compact for which a coated layer which is precise has a large adhesion force and a small adhesion force variation is easily formed. <P>SOLUTION: A molten liquid is formed by melting an RE<SB>2</SB>Si<SB>2</SB>O<SB>7</SB>powder (RE is at least one element of the group 3a elements in the periodic table) or a mixed powder of an RE<SB>2</SB>O<SB>3</SB>powder with an SiO<SB>2</SB>powder and covered on a substrate surface consisting of a silicon nitride sintered compact in a nitrogen atmosphere and then the molten liquid is crystallized and the coated layer whose main crystal is RE<SB>2</SB>Si<SB>2</SB>O<SB>7</SB>is formed on the substrate surface. The molar ratio of Si to RE in the coated layer is 1.9-3 in terms of the oxides ratio, SiO<SB>2</SB>/RE<SB>2</SB>O<SB>3</SB>. RE contained in the coated layer is preferably at least one of Lu, Yb and Er. <P>COPYRIGHT: (C)2004,JPO |
