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发明名称
Interferometrisches Messverfahren und Vorrichtung
摘要
申请公布号
DE10204133(B4)
申请公布日期
2004.05.27
申请号
DE2002104133
申请日期
2002.02.01
申请人
ROBERT BOSCH GMBH
发明人
DRABAREK, PAWEL;STREIBL, NORBERT
分类号
G01B9/02;(IPC1-7):G01B9/02
主分类号
G01B9/02
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代理人
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