| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a nondestructive inspection method capable of measuring the film thickness of a groove part sidewall of a fine structure, and a device for realizing the method. <P>SOLUTION: In this sidewall film thickness measuring method and its device, a focusing charged particle beam capable of being specifically irradiated onto the groove part sidewall of the fine structure is used as a primary beam, or otherwise a wide charged particle beam to be irradiated to a specific wide region including the groove part sidewall of the aimed fine structure is used as the primary beam. A fluorescent X-ray emitted from the sample surface is detected, and the film thickness of a primary beam irradiation part or the average film thickness of the groove part sidewall is measured by being equipped with an energy analytical means or a wavelength analytical means. <P>COPYRIGHT: (C)2004,JPO</p> |
