发明名称 POSITIONING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a positioning device for canceling a reactive force of moment. SOLUTION: The positioning device comprises a movable part and a reactive force absorbing mechanism which absorbs a reactive force of propulsion generated by movement of the movable part. A first distance between the reference surface and the gravity position of the movable part supported to be movable on the reference surface is set almost equal to a second distance between the reference surface and the gravity position of the reactive force absorbing mechanism, and/or the second distance is set almost equal to a third distance between the reference surface and a rotor of the motor for propulsion of the movable part into the reference surface. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004152902(A) 申请公布日期 2004.05.27
申请号 JP20020314926 申请日期 2002.10.29
申请人 CANON INC 发明人 TAKASHIMA TSUNEO
分类号 H01L21/68;G03B27/58;H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/68
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