发明名称 Thin plate storage container
摘要 A wafer storage container has a container body and a lid. Thin plates are inserted into and picked up from the container body. The container has lid supporters placed on a lid receptacle of the container body, and contacting portions contact with the lid supporters to support the lid. A supporting member is a member attached to support the container body. The supporting member has a base plate portion to support the container body, side plate portions formed as standing from the base plate portion, and a handle on each side plate gripped to lift the container body. The thin plate supporting member has contacting portions to support thin plates, supporting members to support the contacting portions elastically, and base supporting bar portions to support the supporting portions. Tip end of each supporting portion contacts with a contacting portion of each supporting stage, and elastically supports the contacting portions from both sides.
申请公布号 US2004099569(A1) 申请公布日期 2004.05.27
申请号 US20030712014 申请日期 2003.11.14
申请人 发明人 MATSUTORI CHIAKI;OYAMA TAKAHARU
分类号 H01L21/68;H01L21/673;(IPC1-7):B65D85/30 主分类号 H01L21/68
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