Holding device for electronic part test, and device and method for electronic part test

摘要

A test holding device having a holding head 102 for detaching holding and conveying an IC chip 110 for connecting the IC chip 110 to connection terminals 112 of a test socket 114. The holding head 102 is provided with a heater 111 able to heat the IC chip 110 in accordance with need. The holding head 102 is provided with a cooling nozzle 117 able to cool the IC chip 110 in accordance with need. A control device 130 control the amount and/or temperature of the air discharged from the heater 111 and cooling nozzle 117 so as to heat the IC chip 110 by the heater 111 and cool the IC chip 110 by the cooling nozzle while conveying the IC chip 110 by the holding head 102 and to heat the IC chip 110 by the heater 111 and stop or weaken the cooling by the cooling nozzle 117 while pressing the IC chip 110 to the connection terminals 112 by the holding head 102.