摘要 |
PROBLEM TO BE SOLVED: To construct a practical electrostatic attracting device capable of preventing the lowering of attraction power due to free-charge trapping in an electrostatic attracting device. SOLUTION: To discharge trapped free charges to an electrode, the electrode is covered with a dielectric membrane provided with suitable conductivity. As a result, it is removed from the membrane, therefore the lowering of the attraction power due to friction or the like is prevented, and such operations as to switch the potential polarity of the electrode or the like can be eliminated, thus realizing the practical electrostatic attracting device which is capable of eliminating an additional circuit and is significantly profitable in cost. COPYRIGHT: (C)2004,JPO |