发明名称 ELECTROSTATIC ATTRACTING DEVICE
摘要 PROBLEM TO BE SOLVED: To construct a practical electrostatic attracting device capable of preventing the lowering of attraction power due to free-charge trapping in an electrostatic attracting device. SOLUTION: To discharge trapped free charges to an electrode, the electrode is covered with a dielectric membrane provided with suitable conductivity. As a result, it is removed from the membrane, therefore the lowering of the attraction power due to friction or the like is prevented, and such operations as to switch the potential polarity of the electrode or the like can be eliminated, thus realizing the practical electrostatic attracting device which is capable of eliminating an additional circuit and is significantly profitable in cost. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004147358(A) 申请公布日期 2004.05.20
申请号 JP20020285620 申请日期 2002.09.30
申请人 DAINIPPON INK & CHEM INC 发明人 MATSUDA YUKITO;NAKATANI YOJI;NAKAGAWA SHIRO
分类号 H01L21/683;H01L21/68;H02N13/00;(IPC1-7):H02N13/00 主分类号 H01L21/683
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