发明名称 |
Lifting glass substrate without center lift pins |
摘要 |
A method for lifting a substrate from a susceptor. A plurality of lift pins is configured so that they support the substrate without contacting a central portion of the substrate. The processed substrate has a first dimension that is at least 500 millimeters and a second dimension that is at least 500 millimeters. Each lift pin in the plurality of lift pins is configured so that it supports the substrate from a point that is at least 120 millimeters from a center of the substrate. The plurality of lift pins is configured so that each side of the susceptor is supported by at least three lift pins. In some embodiments, a support member overlies at least a subset of the plurality of lift pins.
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申请公布号 |
US2004096636(A1) |
申请公布日期 |
2004.05.20 |
申请号 |
US20020299216 |
申请日期 |
2002.11.18 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
HOU LI;SHANG QUANYUAN;GREENE ROBERT I. |
分类号 |
H01L21/687;(IPC1-7):B32B1/00;B05D5/06 |
主分类号 |
H01L21/687 |
代理机构 |
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