发明名称 CARRYING MECHANISM FOR WORKPIECE
摘要 PROBLEM TO BE SOLVED: To provide a carrying mechanism for workpieces whereby such carrying operations as the replacements of the two workpieces can be performed rapidly without any elevating mechanism. SOLUTION: The carrying mechanism for carrying workpieces W while holding them thereby has three rotational shafts 50, 52, 54, a base member 68 attached to one of the three rotational shafts, guide rails 70A, 70B attached to the base member, moving objects 72A, 72B for moving along the rails, holding members 74A, 74B coupled to the moving objects, arms 78A, 78B coupled to the other respective rotational shafts, and motional-direction converting mechanisms 76A, 76B for converting the rotational motions of the arms into the linear motions of the moving objects. Thereby, the rotational motions of the rotational shafts are so converted into the linear motions of the respective holding members as to move the holding members linearly. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004146714(A) 申请公布日期 2004.05.20
申请号 JP20020312207 申请日期 2002.10.28
申请人 TOKYO ELECTRON LTD 发明人 HIROKI TSUTOMU
分类号 B25J18/04;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B25J18/04
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