| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positive photosensitive composition which has a laser beam sensitivity in a near infrared (IR) wavelength region that the sensed part exposed to the laser beam in the near IR wavelength region is made soluble with a developer liquid to unnecessitate a burning process, keeps high sensitivity to realize extremely fine development, obtalns a sharp contour of the edge of a resist image following the irradiated pattern in the exposure, and has excellent latitude in an image formation by development. <P>SOLUTION: The composition comprises an alkali-soluble organic polymer substance having a phenolic hydroxyl group, a photothermal converting dye which absorbs near IR rays from an exposure light source to convert into heat, a cellulose derivative and imidazole silane. <P>COPYRIGHT: (C)2004,JPO |
