Process for semiconductor device fabrication in which an insulating layer is formed over a semiconductor substrate

摘要

The present invention provides a method for manufacturing a semiconductor device comprising an insulating layer that includes a seed layer formed on a substrate. The seed layer is formed by removing hydrogen from the substrate, depositing a seed layer precursor and exposing the precursor to excited atoms to form a seed layer on the substrate. In addition to serving as a template for the growth of a high K dielectric layer, the seed layer retards the undesirable oxidation of the silicon surface thereby improving the performance of active devices that include the insulating layer.