PIEZOELECTRIC ACTUATOR UNIT, ITS MANUFACTURING PROCESS, PIEZOELECTRIC STRUCTURE AND LIQUID EJECTOR EMPLOYING IT

摘要

PROBLEM TO BE SOLVED: To increase the number of nozzles in a liquid ejection head with no trouble.

SOLUTION: The piezoelectric actuator unit 29 comprises a plurality of piezoelectric vibrators 33 each consisting of electrode layers and piezoelectric material layers laid alternately in layers and vibrating in the laying direction. The plurality of piezoelectric vibrators 33 are arranged, side by side, in one row along the arranging direction of vibrators intersecting the laying direction perpendicularly. Each piezoelectric vibrator 33 includes a region on one side and a region on the other side in the widthwise direction of vibrators intersecting both the laying direction and the arranging direction of vibrators perpendicularly. Any one of the region on one side or the region on the other side forms a piezoelectrically deformable active part while the other region forms a piezoelectrically undeformable nonactive part wherein the active part and the nonactive part are arranged reversely between adjacent piezoelectric vibrators.

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