METHOD FOR DISPLAYING INSPECTION SITUATION AT REAL-TIME

摘要

PURPOSE: A method for displaying an inspection situation is provided to confirm contents of defects in real-time, change an inspection result detected as the defect to non-defect in case that the defect is negligible on actual use, and confirm a position of the defect on an inspecting object. CONSTITUTION: A host computer displays an image of an object matched with a green sheet on an inspection situation display screen of a display apparatus(S103). An image processor digitalizes a grayscale image output from a camera installed on an inspection section and temporarily stores a digital image in an internal image memory(S104). The image processor matches an arrangement mark of a measurement pattern stored in the image memory with the arrangement mark of a mask pattern(S105). The image processor performs binarization for the grayscale image of the measurement pattern(S106). The image processor detects the defect of the measurement pattern by finding out an error through comparison between the measurement pattern and the mask pattern for an inspection section(S107). The host computer receives the inspection result and the image data, and displays a defect image(S108).