发明名称 Methods of forming semiconductor stacked die devices
摘要 Semiconductor devices and methods of forming semiconductor devices are described. In one embodiment, a method comprises forming at least one conductive structure within a plurality of semiconductor substrates, said act of forming comprising first forming said at least one conductive structure to extend into a respective semiconductor substrate a distance that is less than an elevational thickness of the substrate, and second removing substrate material elevationally adjacent said one conductive structure effective to expose a surface of said one conductive structure, at least portions of one of the conductive structures having oppositely facing, exposed outer surfaces; and stacking individual substrates together such that individual conductive structures on each substrate are in electrical contact with the conductive structures on a next adjacent substrate.
申请公布号 US2004097010(A1) 申请公布日期 2004.05.20
申请号 US20030706897 申请日期 2003.11.13
申请人 HABA BELGACEM 发明人 HABA BELGACEM
分类号 H01L21/98;H01L25/065;(IPC1-7):H01L21/44;H01L21/50;H01L23/02 主分类号 H01L21/98
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