| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacitor circuit which can reduce series resistance while maintaining leak current characteristics and fatigue characteristics. <P>SOLUTION: A thin film capacitor 10 comprises a substrate 12, a lower electrode 14, a dielectric thin film 16 and an upper electrode 18, and if necessary, an antireaction layer 20 is arranged at the interface between the dielectric thin film 16 and the upper electrode 18. A noble metal having a large work function is used for the lower electrode 14, and a perovskite oxide thin film is used for the dielectric thin film 16. In the dielectric thin film 16, a very small amount of metal ions is added to reduce a leak current. Al having low resistivity or an alloy mainly composed of Al is used for the upper electrode 18. In the circuit, by connecting the upper electrode 18 to a high potential side and the lower electrode 14 to a low potential side, it is made possible to reduce the series resistance while maintaining the leak current characteristics and fatigue characteristics. <P>COPYRIGHT: (C)2004,JPO |
