| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect defects in a minute wiring pattern formed on a sample by improving the contrast of an optical image of the sample formed by the interference between the zeroth and higher-order diffracted light of reflected light arising from illuminating light reflected by the sample surface, in a defects detecting optical system which detects defects in a pattern formed on the sample surface. <P>SOLUTION: A high resolution optical system is constructed by an illuminating optical system which illuminates the sample with polarized light, a polarization optical component which transmits higher order diffracted light after being subjected to polarization rotation by the sample more efficiently than the zeroth light, and a detecting optical system which forms an image of the sample onto a photoelectric conversion device with light transmitted through or reflected by the polarization optical component. <P>COPYRIGHT: (C)2004,JPO |
