| 摘要 |
PROBLEM TO BE SOLVED: To simplify a measurement means and measure a wide range flow rate. SOLUTION: The flow meter is equipped with a valve body 7, a driving part 9 for the valve body 7, a control part 11 for the driving part 9, a valve seat 8 arranged facing the valve body 7, flow rate measuring parts 24 which are installed in the valve body 7 and the valve seat 8 and measure practically the whole region between the valve body 7 and the valve seat 8, a distance measuring part 30 for measuring interval between the valve body 7 and the valve seat 8, and an operation part 36 for calculating passage flow rate between the valve body 7 and the valve seat 8, from a signal from the flow rate measuring part 24 and a signal from the distance measuring part 30. As a result, flow rate measurement in a wide range is enabled with a compact constitution. COPYRIGHT: (C)2004,JPO
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