发明名称 |
Force sensing devices with multiple filled and/or empty channels and other attributes |
摘要 |
A nanoscale force sensing device includes a probe having a tip with multiple isolated channels which can receive different materials. The device may be either straight or cantilevered and may be mounted to permit detection of surface forces while performing other functions at the same time.
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申请公布号 |
US6737331(B1) |
申请公布日期 |
2004.05.18 |
申请号 |
US20020048980 |
申请日期 |
2002.02.19 |
申请人 |
NANOPTICS, INC. |
发明人 |
LEWIS AARON;FISH GALINA;DEKHTER RIMA GLAZER;KOKOTOV SOPHIA |
分类号 |
G01Q60/58;G01Q70/10;G01Q70/14;(IPC1-7):H01L21/76;H01L35/34;H01L35/28;G21K7/00 |
主分类号 |
G01Q60/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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