VORRICHTUNG ZUR WELLENLÄNGEN-DISPERSIVEN ANALYSE VON FLUORESZENZSTRAHLUNG
摘要
The collimator of a probe for a semiconductor surface is replaced and a pair of adjacent multilayer mirrors added. Reflection angle is about 1 to 3 deg. The detector is a position-independent detector. Analyser is used as a surface probe.
申请公布号
AT266857(T)
申请公布日期
2004.05.15
申请号
AT19980111699T
申请日期
1998.06.25
申请人
GKSS-FORSCHUNGSZENTRUM GEESTHACHT GMBH
发明人
SCHWENKE, HEINRICH;KNOTH, JOACHIM;SCHNEIDER, HARALD;BEAVEN, PETER, DR.
