| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high vibration isolation performance all over a wide-frequency zone by eliminating problems such as phase lag and resonance while a sufficiently high sensitivity to detect fine rippling is obtained, in an active vibration isolation system wherein a vibrational state of an apparatus mounted on a precision vibration-proofing base is detected with an acceleration sensor 22 or the like and an actuator 12 is controlled so as to negate this vibration. SOLUTION: The acceleration sensor 22 of a piezoelectric type is arranged on a top plate 13 of an isolator 2. A mass of a plumb 25 of the sensor 22 is set so large (e.g. 60g) that sufficient S/N ratio can be obtained to minute acceleration. A signal Vi output from the acceleration sensor 22 is input in a compensatory circuit 20a of a controller 20, and compensation is performed so as to negate influence by resonance of the plumb 25. The actuator 12 is subjected to feedback control on the basis of an output signal Vo from the compensatory circuit 20a. COPYRIGHT: (C)2004,JPO
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