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发明名称
WAFER TEST DEVICE
摘要
申请公布号
JPH10275835(A)
申请公布日期
1998.10.13
申请号
JP19970080004
申请日期
1997.03.31
申请人
NEC CORP
发明人
TANABE AKITO
分类号
G01R31/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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