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发明名称
Liner-Schicht mit geringer Stufenüberdeckung zur Verbesserung des Kontaktwiderstands bei W-Kontakten
摘要
申请公布号
DE10244570(B4)
申请公布日期
2007.08.16
申请号
DE2002144570
申请日期
2002.09.25
申请人
INFINEON TECHNOLOGIES AG;INTERNATIONAL BUSINESS MACHINES CORP.
发明人
IGGULDEN, ROY;ROBL, WERNER;SHAFER, PADRAIC;WONG, KWONG HON
分类号
H01L21/283;H01L21/768;H01L23/532
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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