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发明名称
Verfahren zur quantitativen Messung eines Substrats
摘要
申请公布号
DE69822949(D1)
申请公布日期
2004.05.13
申请号
DE19986022949
申请日期
1998.07.24
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
IKEDA, SHIN;YOSHIOKA, TOSHIHIKO;NANKAI, SHIRO
分类号
G01N27/327;C12Q1/00;C12Q1/26;(IPC1-7):G01N33/48
主分类号
G01N27/327
代理机构
代理人
主权项
地址
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