| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ZnO thin film of high quality without using any costly substrate. <P>SOLUTION: Mixed crystal Zn<SB>x</SB>M<SB>y</SB>O in which ≥ 70% zinc oxide is mixed with oxide of an arbitrary metal M different from zinc oxide at the ratio y to the ratio x of zinc oxide to form mixed crystal is deposited in a thin film fashion on a surface of a substrate material 2 to obtain a coated member X having a zinc oxide-based thin film 17. The zinc oxide-based thin film 17 of high crystallinity and large grain size can be deposited thereby. By reducing the number of crystal grain boundaries in the zinc oxide-based thin film 17, the zinc oxide-based thin film of high quality suitable for industrial production can be deposited without using any costly substrate. <P>COPYRIGHT: (C)2004,JPO |
