| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To remove both of fluorine and ammonia contained in an exhaust gas by means of a one-stage scrubber. <P>SOLUTION: The exhaust gas treatment apparatus used comprises a scrubber 12, a washing fluid feed mechanism 14 that feeds a washing fluid 20 into the scrubber 12, a silicon compound addition mechanism 26 that adds a silicon compound to the washing fluid 20, a pH adjusting agent addition mechanism 28 that adds a pH adjusting agent to the washing fluid 20, and an exhaust gas feed mechanism 30 that feeds an exhaust gas containing fluorine and ammonia into the scrubber 12. The exhaust gas and the washing fluid containing the silicon compound and having a pH of 3 to 6 are brought into contact with each other in the scrubber 12. <P>COPYRIGHT: (C)2004,JPO</p> |
