发明名称 HANDLER FOR SEMICONDUCTOR SINGULATION AND METHOD THEREFOR
摘要 <p>A water jet handler (200) has a loading location (205), a cutting location (210), and an unloading location (215); and two movable mounts (240 and a245). As a first movable mount (240) receives a molded substrate at the loading location (205), and transports it to the cutting location (210), a second movable mount (245) transports singulated semiconductor packages of a previously singulated molded substrate from the cutting location (210) to the unloading location (215). As the molded substrate on the first movable mount (240) is cut in the X direction (232) by a water jet, the singulated semiconductor packages are unloaded. The molded substrate is then transferred to the second movable mount (245) on which it is cut in the Y direction (272) to produce singulated semiconductor packages, as the first movable mount (240) returns to the loading location (205), where another molded substrate is loaded.</p>
申请公布号 WO2004040639(A1) 申请公布日期 2004.05.13
申请号 WO2003SG00204 申请日期 2003.08.29
申请人 ADVANCED SYSTEMS AUTOMATION LIMITED;CHEW, HWEE, SENG, JIMMY;LIU, FULIN;LIM, KOK, YEOW 发明人 CHEW, HWEE, SENG, JIMMY;LIU, FULIN;LIM, KOK, YEOW
分类号 B24C1/04;B24C3/08;B26D5/34;B26D7/06;B26F3/00;(IPC1-7):H01L21/50;H01L21/304 主分类号 B24C1/04
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