| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a drive unit which allows the space efficiency to be enhanced and is simple in structure, and to provide a method for the manufacture thereof, and equipment using it. <P>SOLUTION: A plurality of diaphragms 2 having a piezoelectric element 22 are integrally formed on a clamping plate 4 through arms 3. The side face of a rotor 101 is abutted against the projections 23 of a plurality of the diaphragms 2. Thus, when the diaphragms 2 are caused to vibrate, a fan 100 is rotated together with the rotor 101, and parts to be cooled are cooled. The diaphragms 2, arms 3, and clamping plate 4 are integrally formed from the same substrate. Therefore, it is unnecessary to individually form a plurality of the diaphragms 2, and the manufacture of the drive unit is simplified. Further, since no space is required for fixing a plurality of the diaphragms 2, the space efficiency of the drive unit 1 is enhanced. <P>COPYRIGHT: (C)2004,JPO |
