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发明名称
Halbleiteranordnung
摘要
申请公布号
DE69332960(T2)
申请公布日期
2004.05.13
申请号
DE1993632960T
申请日期
1993.01.27
申请人
CANON K.K., TOKIO/TOKYO
发明人
INOUE, SHUNSUKE;MIYAWAKI, MAMORU;KOHCHI, TETSUNOBU
分类号
H01L21/336;H01L21/762;H01L21/8238;H01L27/06;H01L27/12;H01L29/786;(IPC1-7):H01L21/823
主分类号
H01L21/336
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代理人
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