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发明名称
METHOD FOR THE FABRICATION OF SUSPENDED POROUS SILICON MICROSTRUCTURES AND APPLICATION IN GAS SENSORS
摘要
申请公布号
EP1417151(A1)
申请公布日期
2004.05.12
申请号
EP20020712117
申请日期
2002.02.18
申请人
NCSR "DEMOKRITOS"
发明人
TSAMIS, CHRISTOS;TSEREPI, ANGELIKI;NASSIOPOULOU, ANDROULA, G.
分类号
G01N27/16;B81B3/00;B81C1/00;G01F1/684;G01N27/12;G01N27/18;H01L37/00;H05B3/26;(IPC1-7):B81B3/00;H05B1/00
主分类号
G01N27/16
代理机构
代理人
主权项
地址
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