SAMPLE HOLDER FOR INSPECTION

摘要

PURPOSE: A sample holder for inspection is provided to reduce transformation and breakage caused by compression force of a spring for closely attaching the sample by making the main body of the sample holder formed of a built-in type. CONSTITUTION: Inspection grooves(202c) for inspecting the sample are formed from the first surface of the main body(202) toward the second surface opposite to the first surface. Inspection holes(202d) are formed between the inspection grooves and the second surface. The main body is closely attached to the inner surface of the inspection grooves so that the inspection surface of the sample exposes to a direction of the second surface through the inspection holes. A fixing plate(204) fixes the sample, inserted into the inspection grooves. A coupling member couples the main body to the fixing plate.