METHOD FOR MANUFACTURING THICK BORON NITRIDE FILM USING BINDER

摘要

PURPOSE: A method for manufacturing thick boron nitride (BN) film having chemical resistance and superior thermal conductivity and insulating property by heat treating the BN/inorganic binder slurry coated on the sample after coating a sample with a BN/inorganic binder slurry prepared by mixing BN powder with silica based inorganic binder. CONSTITUTION: The method for manufacturing thick boron nitride film using binder comprises a step(1) of preparing slurry by adding boron nitride (BN) powder to alcohol; a step(2) of preparing a BN/inorganic binder slurry by agitating the mixture after adding a silica based inorganic binder in which alkali metal is not contained to the BN/alcohol slurry of the step(1); a step(3) of coating the BN/inorganic binder slurry of the step(2) on a sample; a step(4) of drying the sample coated with the BN/inorganic binder slurry at a room temperature; and a step(5) of forming a thick BN film by heat treating the dried sample, thereby removing organic matter, wherein the method further comprises a step of pretreating the BN powder with a coupling agent before adding alcohol to the BN powder in the step(1).