发明名称 Method and system for detecting defects
摘要 Method for detecting defects, the method comprising the procedures of identifying theoretically-symmetrical windows in an object-image; analyzing the theoretically-symmetrical windows according to expected symmetry of the theoretically-symmetrical windows; and determining the presence of defects according to a deviation from the expected symmetry.
申请公布号 US6735745(B2) 申请公布日期 2004.05.11
申请号 US20020072313 申请日期 2002.02.07
申请人 APPLIED MATERIALS, INC. 发明人 SARIG NIMROD
分类号 G03F1/00;G06T7/00;G06T7/60;(IPC1-7):G06F17/50;G06F19/00;G06F17/18;G06K9/74;G06K9/46 主分类号 G03F1/00
代理机构 代理人
主权项
地址