发明名称 Apparatus and process for producing zinc oxide film
摘要 Disclosed are a process for producing a zinc oxide film comprising the steps of transporting a conductive long substrate via above at least one electrode comprised of zinc in an electrodeposition bath held in an electrodeposition tank and applying an electric field between the electrode and the conductive long substrate, thereby forming a zinc oxide film on the conductive long substrate, the process comprising a first step of forming the zinc oxide film on a part of the conductive long substrate; a second step of stopping the application of the electric field and the transportation; and a third step of bringing at least a region of a part of the conductive long substrate being in contact with the electrodeposition bath in the second step into non-contact with the electrodeposition bath, and an apparatus suitably used for the process. The process and apparatus enables high-quality zinc oxide films to be produced.
申请公布号 US6733650(B2) 申请公布日期 2004.05.11
申请号 US20010897012 申请日期 2001.07.03
申请人 CANON KABUSHIKI KAISHA 发明人 SONODA YUICHI;ARAO KOZO;TOYAMA NOBORU;MIYAMOTO YUSUKE
分类号 C25D9/10;C25D7/06;C25D9/08;C25D17/00;C25D21/00;C25D21/18;H01L31/04;(IPC1-7):C25D7/06 主分类号 C25D9/10
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