| 摘要 |
A profile measurement apparatus of the present invention is characterized in that two flash light beams, having wavelengths slightly different from each other, are emitted to an object with a predetermined interval t1 therebetween, and when a camera picks up interference light formed by light beams reflected from the object and a light beam reflected from the reference mirror, while moving the object in a direction, in which the two flash light beams are directed, in units of intervals t2 at which each of the two flash light beams is cyclically emitted, a phase shift amount corresponding to a movement amount of the object at a time is set to a value falling within a range of 2npi±pi/2±pi/4.
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