| 摘要 |
PURPOSE: A method and an apparatus for inspecting a flat patterning medium are provided to improve the speed and accuracy of inspection and repair. CONSTITUTION: A DDS(Defect Detection Sub-system)(12) performs relatively low resolution imaging, and detects a defect candidate through an imaging device using a positioning protocol. A DRS(Defect Review Sub-system)(24) performs relatively high resolution imaging, and simultaneously reviews defect indicated by the DDS using the positioning protocol. The DDS provides a review value after detecting the defect candidate.
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