发明名称 FLOW CONTROL STOCKER SHELF
摘要 PURPOSE: A flow control stocker shelf is provided to simultaneously and stably carry out the control of flow rate and speed by using a guide spoiler. CONSTITUTION: A stocker shelf basic unit is provided with a guide spoiler(110), a shelf assembly(120), a hinge(131) used as a connection part, a hinge connection bolt(136), and an angle control bolt(137). The guide spoiler includes a flow control plate(111) and an angle control plate(112). The self assembly includes a shelf beam(121) and shelf post(122). The flow control plate of the guide spoiler and the shelf beam of the shelf assembly are connected with each other by using the hinge and the hinge connection bolt through a hinge connection groove(116) formed at the lower portion of the flow control plate and a hinge connection hole(126) of the guide spoiler. A guide groove(113) formed at the upper portion of the angle control plate is fixed to an angle control hole(127) of the shelf post by using the angle control bolt for controlling the position of a guide tip(115) and the angle of the flow control plate.
申请公布号 KR20040038929(A) 申请公布日期 2004.05.08
申请号 KR20040020158 申请日期 2004.03.24
申请人 AVACO CO., LTD.;HUR, JI HYE;KIM, HAE RYUNG;SEO, MAN SEUNG 发明人 KIM, HAE RYUNG;SEO, MAN SEUNG
分类号 H01L21/68;H01L21/00;(IPC1-7):H01L21/68 主分类号 H01L21/68
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