| 发明名称 |
VAPOR DELIVERY SYSTEM FOR SOLID PRECURSORS AND METHOD OF USING SAME |
| 摘要 |
A vaporizer delivery system including a sublimatable solid precursor material applied to a wire substrate for vaporizing and achieving a continuous uninterrupted delivery of a vaporized precursor to a downstream semiconductor process chamber. The coated wire substrate is drawn past a heat source at a predetermined speed to rapidly heat and vaporize the sublimatable solid precursor.
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| 申请公布号 |
US2004083965(A1) |
申请公布日期 |
2004.05.06 |
| 申请号 |
US20020288743 |
申请日期 |
2002.11.06 |
| 申请人 |
WANG LUPING;BAUM THOMAS H.;XU CHONGYING |
发明人 |
WANG LUPING;BAUM THOMAS H.;XU CHONGYING |
| 分类号 |
B01D3/34;C23C16/448;H01L21/285;(IPC1-7):B01D7/00;C23C14/00;C23C16/00;H01L21/31;H01L21/44;H01L21/469 |
主分类号 |
B01D3/34 |
| 代理机构 |
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代理人 |
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