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发明名称
Plasma applicators
摘要
申请公布号
EP0800200(B1)
申请公布日期
2004.05.06
申请号
EP19970301831
申请日期
1997.03.18
申请人
AKT, INC.
发明人
ETTINGER, GARY C.;SHANG,QUANYUAN;LAW,KAM S.
分类号
H05H1/46;C23F4/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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