发明名称 |
Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber |
摘要 |
A wafer scrubbing unit includes a mounting assembly for a scrubber brush. The mounting assembly has a rotary flow through tube through which cleaning liquid is delivered to the brush. A stationary tube may be mounted in the bore of the rotary tube. Spinning shields mounted on the rotary tube form labyrinth seals to protect a bearing housing from the cleaning liquid. Bearings for rotatably mounting the rotary tube are mounted within the housing.
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申请公布号 |
US6728989(B2) |
申请公布日期 |
2004.05.04 |
申请号 |
US20010771086 |
申请日期 |
2001.01.27 |
申请人 |
APPLIED MATERIALS INC. |
发明人 |
LERNER ALEXANDER;WHITE JOHN M.;CHANG SHOU-SANG;SUGARMAN MICHAEL |
分类号 |
B08B1/04;B08B3/04;H01L21/00;(IPC1-7):A46B13/04 |
主分类号 |
B08B1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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