发明名称 Wafer-level coated copper stud bumps
摘要 A method for forming a semiconductor die package is disclosed. In one embodiment, the method includes forming a semiconductor die comprising a semiconductor device. A plurality of copper bumps is formed on the semiconductor die using a plating process. An adhesion layer is formed on each of the copper bumps, and a noble metal layer is formed on each of the copper bumps.
申请公布号 US6731003(B2) 申请公布日期 2004.05.04
申请号 US20030386621 申请日期 2003.03.11
申请人 FAIRCHILD SEMICONDUCTOR CORPORATION 发明人 JOSHI RAJEEV;TANGPUZ CONSUELO;CRUZ ERWIN VICTOR R.
分类号 H01L21/60;H01L23/485;H01L29/78;(IPC1-7):H01L23/48 主分类号 H01L21/60
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