发明名称
摘要 Integrated circuit devices are provided including an integrated circuit substrate and a gate on the integrated circuit substrate. The gate has sidewalls. A barrier layer spacer is provided on the sidewalls of the gate. A portion of the barrier layer spacer protrudes from the sidewalls of the gate exposing a lower surface of the barrier layer spacer that faces the integrated circuit substrate. A silicide layer is provided on the portion of the barrier layer spacer protruding from the sidewalls of the gate.
申请公布号 KR100429886(B1) 申请公布日期 2004.05.03
申请号 KR20020026785 申请日期 2002.05.15
申请人 发明人
分类号 H01L21/8238;H01L21/28;H01L21/285;H01L21/336;H01L21/8234;H01L21/8242;H01L27/10;H01L27/105;H01L27/108;H01L29/417;H01L29/78 主分类号 H01L21/8238
代理机构 代理人
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