| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyance device for a beltlike workpiece capable of preventing a particle from adhering to the beltlike workpiece even if dry air (or nitrogen gas and rare gas) for floating the beltlike workpiece is fed toward the beltlike workpiece from a work stage in the conveyance device for the beltlike workpiece provided with the work stage forming a holding face of the beltlike workpiece by a porous sintered body. SOLUTION: This conveyance device for the beltlike workpiece conveys the beltlike workpieces sequentially and is provided with the work stage forming the holding face of the beltlike workpiece by the porous sintered body, a box body having the sintered body on its one side face, and a gas feeding port provided in the sintered body or in the vicinity of the sintered body. Vacuum only is supplied into the box body, and gas is supplied into the gas feeding port. COPYRIGHT: (C)2004,JPO
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